Abstract
ASML's High-NA chipmaking tool will cost $380 million — orders for 10 to 20 machines (Tom's Hardware). Fetched by the auto-model research pass; the figures below are cited from this source in the model's flow, idiot-index, energetic-index, and market tabs.
Key facts
- High-NA Twinscan EXE costs ~$380M (€350M)
- Low-NA Twinscan NXE EUV systems cost ~€170M ($183M)
- 10-20 High-NA orders to date (Intel, SK hynix)
- Plan to build 20 High-NA per year by 2028
- Each High-NA weighs 150,000 kg, 250 crates, ~6 months & 250 engineers to assemble
Reviewer note
Real source gathered during the extend-silicon-stack research pass (2026-06-21). Figures attributed to it in the model link back here.