Abstract

How Much Does a TSMC 3nm Chip Cost to Make? / Semiconductor Manufacturing Costs Explained. Fetched by the auto-model research pass; the figures below are cited from this source in the model's flow, idiot-index, energetic-index, and market tabs.

Key facts

• 3nm full mask set ~$15M (range $10-20M); 5nm mask set ~$6.5M
• 5nm design NRE $200-400M; 3nm design NRE $400-600M+ (includes EDA, IP, masks, headcount, verification)

Reviewer note

Real source gathered during the extend-silicon-stack research pass (2026-06-21). Figures attributed to it in the model link back here.