Abstract

(Scaffold stub — extract pending the research pass.) ASML's annual report: EUV/DUV systems shipped, average selling prices, R&D and service revenue. Used here to anchor the amortized per-wafer cost of EUV lithography; exact unit counts and ASPs to be extracted and verified before attribution.

Key claims

• euv-systems-shipped: ASML ships a limited number of EUV systems per year at very high ASP; amortized per-wafer this is a major cost driver. (anchor placeholder — verify exact counts/ASP)

Reviewer notes

Scaffold extract. Slug resolves so the citation is wired; figures must be fetched and verified by the research pass before any number is sourced here.